- subthreshold illumination
- допороговое облучение (с плотностью мощности ниже порога плавления)
English-Russian dictionary of mechanical engineering and automation. - RUSSO. B.S. Voskoboinikov, V.L. Mitrovich. 2003.
subthreshold illumination
Смотреть что такое "subthreshold illumination" в других словарях:
Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… … Wikipedia
